X. Borrisé, G. Abadal, D. Jiménez, F. Peréz-Murano, N. Barniol, Z.J. Davis, A. Boisen, "Light propagation studies on laser modified wavequides using near-field Optical microscopy, IEEE Photonics Technology Letters, 13(8), pp. 809-811 (2001). 

Description:

Researcher are fabricating a mass sensor based on a resonating cantilever or beam. The principle is that the resonant frequency of the resonating cantilever or beam is dependent on mass of the device, thus by monitoring the resonant frequency change of the cantilever or beam, any mass changes of the device can be detected. By miniaturizing the dimensions of the mechanical device, the mass resolution in increased, thus the fabrication of the cantilever or beam needs to be made with nanolithography techniques.

 Above are two images of the laterally vibrating cantilever at its fundamental and 1st mode resonance frequencies.  It was found that the Quality factor increases by a factor 400, from 70 to 28000, by operating the cantilever in vacuum. This proves that acoustic damping is very high when using the device in gases.

 

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