Nanofabrication of a Two-Dimensional Array Using Laser-Focused Atomic Deposition, R. Gupta, J.J. McClelland, Z. Jabbour, and R.J. Celotta, Appl. Phys. Lett. 67(10), 1378 (1995).

Description:

Above is an atomic force microscope image of a two-dimensional array formed by laser-focused atomic deposition of Cr. Features have height 13 nm, width 80 nm, and are on a 213 x 213 nm square grid.

The two dimensional array of dots is formed using two orthogonal standing waves of laser light interfering together.  In general, the intensity pattern will depend on the relative path lengths experienced by the two standing waves because of constructive or destructive interference, and if the path lengths vary due to acoustical vibrations, the pattern can be smeared out. However, by choosing the polarizations of the two waves to be perpendicular to each other (one parallel to the substrate surface, the other perpendicular). With this choice, the intensity no longer depends on the relative phase so it remains stable. The price paid is an intensity distribution that is not entirely cylindrically symmetric about each node, though the effect of this is minor.

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