www.nanopicoftheday.org
March 20, 2004
FIB/SEM
Source: Henny
Zandbergen
References:
-
S. Lazar, G.A. Botton, M.-Y. Wu, F.D.
Tichelaar, and H.W. Zandbergen, "Materials science applications of HREELS in
near edge structure analysis and low energy loss spectroscopy,"
Ultramicroscopy 96, 535-546 (2003).
Description:
An FEI Small Stage DualBeam focused ion beam/scanning electron microscope (FIB/SEM)
is used for preparation of thin samples for High Resolution Transmission
Electron Microscopy (HRTEM) as well as microsurgery and precise deposition of
electrical contacts. An example is shown in the SEM image in above, where an
isolation groove has been ion-milled in an iron oxide (Fe3O4)
thin film and platinum contacts have been formed by ion-beam deposition in the
FIB/SEM. The gap between the contacts is approximately 40 nm.
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