"Ultrananocrystalline Diamond Thin Films for MEMS and Moving Mechanical Assembly Devices" A.R.Kraus, O.Auciello, D.M.Gruen, A.Jayatissa, A.Sumant,J.Tucek, D.C.Mancini, N.Moldovan, A.Erdemir, D.Ersoy, M.N.Gardos, H.G.Busmann, E.M.Meyer, M.Q.Ding, Diamond and Related Materials, 10 (11), 1952-1961 (2001).

Description:

Ultrananocrystalline Diamond (UNCD) films synthesized under a wide range of deposition conditions exhibit remarkable electrical and mechanical properties.  These properties are unprecedented for synthetic diamond. They appear to be the result of the small grain size (2-3 nm) and high chemical purity but there is no detailed understanding of the quantitative effects of these nanoscale features on the properties relevant to MEMS/NEMS devices. Furthermore, n-type doped UNCD films, with nitrogen incorporated primarily at the grain boundaries, exhibit semi-metallic electrical conductivity, although with slightly degraded mechanical properties.  These properties of UNCD allow them to be of great use in building robust, durable MEMS/NEMS devices such as this MEMS rotor seen above.
 

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